학술논문
A monolithic visible, infrared and terahertz 2D detector
Document Type
Conference
Source
35th International Conference on Infrared, Millimeter, and Terahertz Waves Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on. :1-2 Sep, 2010
Subject
Language
ISSN
2162-2027
2162-2035
2162-2035
Abstract
A monolithic multispectral detector for imaging in the visible (VIS), infrared (IR) and terahertz (THz) ranges has been designed for operation at room temperature. This sensor is composed of a CMOS readout integrated circuit (ROIC) housing visible photodiodes and of IR and THz microbolometer pixels processed above the CMOS wafer. Without package- and systemlevel issues, targeted individual pixel sensitivities are respectively an 80dB dynamic range for VIS photodiodes, a NETD=50mK @f/1 for IR and a THz NEP smaller than 10pW. Prototyping chips will be integrated in tri-spectral imaging and THz spectroscopy demonstration systems.