학술논문
Femtosecond micromachining applications for electro-optic components
Document Type
Conference
Author
Source
2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220) Electronic components and technology Electronic Components and Technology Conference, 2001. Proceedings., 51st. :210-214 2001
Subject
Language
ISSN
0569-5503
Abstract
This paper investigates applications of femtosecond lasers in the improved manufacturing of microelectronic and electrooptic components. It examines the requirements for a precision laser micromachining system and discusses the capability of a commercially available laser systems to micromachine feature sizes from 1 mm down to submicron depths for a variety of materials including ceramics, metals, polymers and transparent materials. The precise nature of the ablation process can be utilized to carry out precision shaping of microfeatures for a particular application. Aspect ratios of 100 /spl mu/m smooth holes obtained can be greater than 10. No post processing is required and the substrate is unaffected.