학술논문

Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering
Document Type
Periodical
Source
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(6):522-528 Dec, 2023
Subject
Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
Resonant frequency
Resonators
Probes
Silicon
Filtering
Metamaterials
Micromechanical devices
Energy harvesting
Elastic filters
delay lines
metamaterials
graded resonators
rainbow effect
energy harvesting
Language
ISSN
1057-7157
1941-0158
Abstract
Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface Rayleigh and Lamb flexural waves to effectively achieve phononic signal control along predefined channels. The guided waves are then spatially controlled using a suitable grading of the micro-resonators, which provide high signal-to-noise ratio and simultaneously create phononic delay-lines. The proposed device can be used for sensing, wave filtering or energy harvesting. [2023-0117]