학술논문
Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering
Document Type
Periodical
Author
Source
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(6):522-528 Dec, 2023
Subject
Language
ISSN
1057-7157
1941-0158
1941-0158
Abstract
Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface Rayleigh and Lamb flexural waves to effectively achieve phononic signal control along predefined channels. The guided waves are then spatially controlled using a suitable grading of the micro-resonators, which provide high signal-to-noise ratio and simultaneously create phononic delay-lines. The proposed device can be used for sensing, wave filtering or energy harvesting. [2023-0117]