부산대학교 도서관

A displacement-based accelerometer is proposed by a tunnel magnetoresistance (TMR) integrated with a parallel beam and an electromagnetic force negative feedback unit. A high sensitivity with a wide detection range can be achieved and adjusted by the proposed accelerometer. A fabricated prototype, comprised of a TMR, one pair of parallel beam spring oscillator, and a permanent magnet, to sense the variation of the magnetic field caused by the external acceleration, is constructed to demonstrate the proposed displacement-based acceleration sensing mechanism. Compared with the state of the art, a high sensitivity up to 730 mV/g in a range of [−2, 4 g] is obtained. Compared with a displacement-based capacitance-type one, there are more rooms, including but not limited to high-performance TMR, parallel beam amplification, and advanced magnets, for structural optimization and performance improvement with the proposed displacement-based TMR-type accelerometer. This work is believed to be of great significance for promoting the research and development of displacement-based accelerometers and their related applications.