학술논문
A Fabry-Perot refractometer for chemical vapor sensing by solid-phase microextraction
Document Type
Conference
Author
Source
16th International Conference on Optical MEMS and Nanophotonics Optical MEMS and Nanophotonics (OMN), 2011 International Conference on. :85-86 Aug, 2011
Subject
Language
ISSN
2160-5033
2160-5041
2160-5041
Abstract
The contour lithography method [1] is used to improve the fabrication yield of previously demonstrated [2] microfluidic Fabry-Perot (FP) refractive index (RI) sensors. The sensors are then coated with polydimethylsiloxane (PDMS) based polymers to detect vapor analytes by solid-phase microextraction (SPME). Preliminary characterization of devices coated with two different polymers and exposed to xylenes vapors yields a maximum sensitivity of 0.015 nm/ppm and a detection limit below 120 ppm.