학술논문
Capacitive detection in thin film chemical sensors and biosensors
Document Type
Conference
Author
Source
ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) Advanced semiconductor devices and microsystems Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on. :255-258 1998
Subject
Language
Abstract
Thin film electrode chips on silicon substrate have been realized and utilized in development of different chemo- and biosensors. These affinity sensors are based on capacitive transducing and their general structure is thin film Au/alkanethiol/receptor. Several applications of thin film gold electrodes in capacitive sensors are presented.