학술논문
A Miniature All-optical Dual-resonance Photoacoustic Sensor for Trace Gas Measuring
Document Type
Conference
Author
Source
2022 IEEE 14th International Conference on Advanced Infocomm Technology (ICAIT) Advanced Infocomm Technology (ICAIT), 2022 IEEE 14th International Conference on. :180-183 Jul, 2022
Subject
Language
ISSN
2770-1603
Abstract
In this paper, a miniature all-optical dual-resonance photoacoustic (PA) sensor is demonstrated. This sensor consists of a small size resonant T-type PA cell together with an integrated sensor probe with a silicon cantilever beam. With the average time of 1 s, the minimum detection limit is tested to be 1.2 parts-per-million. Therefore, we believe that the reported sensor can be suitable for high-sensitivity measurements of trace gases in sub-cubic centimeter-scale spaces.