학술논문

Dual-Mode Silicon Photonic Crystal Nanocavity Modulator with Indium Oxide Gate
Document Type
Conference
Source
2018 IEEE Photonics Conference (IPC) Photonics Conference (IPC), 2018 IEEE. :1-2 Sep, 2018
Subject
Components, Circuits, Devices and Systems
Photonics and Electrooptics
Modulation
Silicon
Photonics
Photonic crystals
Logic gates
Q-factor
Permittivity
modulator
silicon photonics
photonic crystal cavity
transparent conductive oxide
Language
ISSN
2575-274X
Abstract
We report an ultra-efficient indium oxide gated silicon photonic crystal nanocavity electro-optical modulator, which is based on a dual-mode operation of resonance tuning and electro-absorption. With only 0.35μm long electrode, we achieved a tuning efficiency of 250pm/V and a modulation strength of 4dB/V with 35% from electro-absorption.