부산대학교 도서관

In this work, we report a micro-Pirani vacuum sensor based on super-aligned carbon nanotube (CNT) films. The devices are batch fabricated on silicon wafers utilizing simple microfabrication process, demonstrating much higher capability of large-scale and efficient parallel manufacturing compared with the previous reported CNT Pirani sensors. Additionally, owing to the nanoscale diameter and excellent electrical and physical properties of CNT films, the upper pressure operating range is pushed up to several atmospheres ( $\approx 2.5\times 10^{5}$ Pa). And the devices exhibit good performance on reproducibility (standard deviation of < 0.32%) and relatively high accuracy (relative error of 0.39% at $2\times 10^{4}$ Pa). All these results demonstrate the feasibility of our device as pressure sensors in future.