학술논문

Versatile Bezier bends for silicon photonics
Document Type
Conference
Source
2017 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2017 Conference on. :1-2 Jul, 2017
Subject
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
General Topics for Engineers
Silicon
Photonics
Fabrication
Resonators
Optical losses
Silicon-on-insulator
Strips
Bezier bends
silicon photonics
Language
Abstract
We report on the design and fabrication of silicon Bezier bends for the communication wavelength of 1550 nm. By varying the Bezier parameter B, the bend losses can be controlled for different bend radius. At a bend radius of 2 μm, bend losses of 0.0652 to 0.269 dB per 180 o bend is experimentally demonstrated for the TE polarization using silicon channel waveguide with width 500nm, and height 220nm for B = 0.2–0.45.