학술논문

Integration of silicon photonics into DRAM process

Document Type

Conference

Author

Shin, D. J.; Cho, K. S.; Ji, H. -C.; Lee, B. S.; Kim, S. G.; Bok, J. K.; Choi, S. H.; Shin, Y. H.; Kim, J. H.; Lee, S. Y.; Cho, K. Y.; Kuh, B. J.; Shin, J. H.; Lim, J. S.; Kim, J. M.; Choi, H. M.; Ha, K. H.; Park, Y. D.; Chung, C. H.

Source

2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC) Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013. :1-3 Mar, 2013

Subject

Photonics and Electrooptics
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Random access memory
Integrated optics
Modulation
Optical interconnections
Optical waveguides
Photonics
Performance evaluation

Language

Abstract

We present an electro-photonic circuit integrated into a 65-nm DRAM periphery process. Its photonic circuit features 2-dB/mm waveguide, 7-dB grating coupler, 10-Gb/s modulator, and 5-Gb/s Ge photodiode.

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