학술논문
High-Q maintenance of microcavity by using a sealed and packaged structure
Document Type
Conference
Author
Source
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. :619-622 Mar, 2012
Subject
Language
Abstract
The high-Q maintenance of microcavities greatly challenges the microresonator-based practical application. In this paper, the Q spoiling factors are demonstrated experimentally to show the Q spoiling which originated from the water and the particulate in the surroundings. Then we propose and realize the Q maintenance through constructing a sealed and packaged microcavity regime. In the packaged structure the Q decreases a little but a high Q larger than 10 6 can be achieved continuously. Moreover, the sealed structure has good performance to maintain the high Q for a long time with the standard deviation about 10 4 , because the Q spoiling factors are isolated by the package layer. Additionally, the package also enhances the robustness. These merits can promote the practical application of the microcavities.