학술논문

High-Q maintenance of microcavity by using a sealed and packaged structure
Document Type
Conference
Source
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. :619-622 Mar, 2012
Subject
Components, Circuits, Devices and Systems
Computing and Processing
Bioengineering
Communication, Networking and Broadcast Technologies
Signal Processing and Analysis
Nanoelectromechanical systems
Couplings
Robustness
Sensors
Maintenance engineering
Microcavity
High-Q maintenance
Package
Language
Abstract
The high-Q maintenance of microcavities greatly challenges the microresonator-based practical application. In this paper, the Q spoiling factors are demonstrated experimentally to show the Q spoiling which originated from the water and the particulate in the surroundings. Then we propose and realize the Q maintenance through constructing a sealed and packaged microcavity regime. In the packaged structure the Q decreases a little but a high Q larger than 10 6 can be achieved continuously. Moreover, the sealed structure has good performance to maintain the high Q for a long time with the standard deviation about 10 4 , because the Q spoiling factors are isolated by the package layer. Additionally, the package also enhances the robustness. These merits can promote the practical application of the microcavities.