학술논문

Tuneable Breakdown Voltage in Amorphous Silicon P-I-N Photo-detectors for Single Photon Imaging
Document Type
Conference
Source
2022 IEEE 22nd International Conference on Nanotechnology (NANO) Nanotechnology (NANO), 2022 IEEE 22nd International Conference on. :355-358 Jul, 2022
Subject
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Semiconductor device modeling
Power demand
Simulation
Imaging
Doping
Amorphous silicon
Semiconductor process modeling
Language
ISSN
1944-9380
Abstract
Single Photon Avalanche Diodes (SPAD) have been widely used as the photo-detectors of choice in CMOS single photon imagers. These are p-n diodes which are biased at a voltage higher than its breakdown voltage and hence, suffer from high power requirements. Additionally, the breakdown voltage of such diodes is predetermined by the fabrication process and cannot be tuned easily. Reducing the breakdown voltage in such diodes can result in reduced power consumption, consequently, enabling the design of low power imagers. In this paper, we present a novel hydrogenated amorphous silicon (a-Si:H) p-i-n diode operating in avalanche mode for single photon imaging applications. Built with nanometer dimensions, simulation results demonstrate that breakdown voltage tunability of these diodes can be achieved by varying the thin film layer thickness and doping concentration of each layer, leading to breakdown voltage as low as 6 V.