학술논문
Water Vapor Doped TCO Films and Application to Silicon Heterojunction Solar Cells
Document Type
Conference
Author
Source
2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC) Photovoltaic Energy Conversion (WCPEC), 2018 IEEE 7th World Conference on. :2121-2125 Jun, 2018
Subject
Language
Abstract
In this work, we demonstrate the application of water vapor doped indium oxide, alloyed with transition metal element M (IMO), as highly transparent conductive oxide (TCO) films incorporated in bifacial silicon heterojunction (SHJ) solar cells. By adding water vapor and oxygen gas into sputtering gas mixture, both electrical and optical properties of IMO film can be improved significantly. IMO films are characterized by sheet resistivity, Hall mobility and carrier density, crystallinity, and spectral transmittance. Finally, we obtained a 0.64 mA/cm 2 gain in J SC with optimal water vapor doped IMO film on n-side of SHJ cell, resulting in a 0.31% increase in solar cell conversion efficiency.