학술논문

Demonstration of Mos2 Memtransistor with Poly-Si Source/Drain Featuring Tunable Conductance States and Boosted ION
Document Type
Conference
Source
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2023 7th IEEE. :1-3 Mar, 2023
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Electrodes
Memristors
Switches
Artificial neural networks
Logic gates
Ions
CMOS process
two-dimensional materials
resistive switching
memtransistor
Language
Abstract
Memtransistor, a hybrid transistor and memristor, features both semi-conductive and resistive switching properties. We demonstrate that the resistive property in both $\text{MoS}_{2}$ crossbar memristor and planar memtransistor structures based on highly compatible CMOS process with heavily-doped poly-Si as bottom electrode (BE) and source/drain (S/D), respectively. Low-resistance/ high-resistance state current ratio $(\mathrm{I}_{\text{LRS}}/\mathrm{I}_{\text{HRS}})$ in memtransitors can be modified by both back gate and S/D electrodes, favoring operation of artificial neural networks. A boosted I ON is found after the set process, exhibiting a new manner to acquire high-performance $\text{MoS}_{2}$ devices. Our work presents a novel memtransistor concept based on 2D material device for memory and logic applications.