부산대학교 도서관

This study investigated a novel forward body bias (FBB) analysis to optimize the threshold voltage ( $\text{V}_{\mathrm {th}}$ ) at cryogenic temperatures in the latest dynamic random-access memory (DRAM). Electrical measurements were conducted to analyze the cryogenic body bias effect in terms of performance, reliability, and short-channel effect in two types of transistors: DRAM peripheral low $\text{V}_{\mathrm {th}}$ transistors (Peri LVT) and buried-channel-array transistors (BCAT). At 77 K, the $\text{V}_{\mathrm {th}}$ shift ( $\Delta \text{V}_{\mathrm {th}}$ ) in BCAT was larger than that in Peri LVT due to the difference in channel doping concentration. It was observed that only BCAT experienced a decrease in saturation drain current ( $\text{I}_{\mathrm {d.sat}}$ ) at cryogenic temperature because of the large $\Delta \text{V}_{\mathrm {th}}$ . To compensate for the $\Delta \text{V}_{\mathrm {th}}$ , FBB was applied to transistors. As a result, FBB effectively controlled the $\text{V}_{\mathrm {th}}$ and improved carrier mobility. Furthermore, this study demonstrated that FBB reduced hot-carrier degradation (HCD) at cryogenic temperature and improved short-channel effect, such as drain-induced barrier lowering (DIBL). These findings offer valuable solutions for optimizing cryogenic memory operation in quantum computing applications.