학술논문
High overtone Bulk Acoustic Resonators built on single crystal stacks for sensors applications
Document Type
Conference
Author
Source
2011 IEEE SENSORS Proceedings Sensors, 2011 IEEE. :516-519 Oct, 2011
Subject
Language
ISSN
1930-0395
Abstract
This paper describes the principles of single crystal LiNb0 3 /Quartz high overtone bulk resonators and their application to the development of compact sensors dedicated to temperature and stress measurements. Design approaches are presented and first experimental results demonstrating the operation of such sensors are reported.