학술논문
Transient Response of Miniaturized Piezoresistive Sensors for Side-On Pressure Shock Wave in Air
Document Type
Conference
Author
Source
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2019 Symposium on. :1-4 May, 2019
Subject
Language
Abstract
Transient response of a miniaturized silicon piezoresistive sensor is simulated here for the first time when a pressure shock wave propagates along the sensor’s surface, or equivalently, for side-on pressure shock wave in air. These mechanical simulations show that it is possible to reduce the sensor’s reaction time by a factor about 10 from carefully adjusting the membrane dimensions.