학술논문

65nm CMOS BULK to SOI comparison
Document Type
Conference
Source
2007 IEEE International SOI Conference SOI Conference, 2007 IEEE International. :79-80 Oct, 2007
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Frequency
Implants
Circuit simulation
CMOS logic circuits
Silicon
Semiconductor films
Threshold voltage
Delay
Circuit synthesis
Integrated circuit interconnections
Language
ISSN
1078-621X
Abstract
SOI is today mainly used for high-speed CPU applications. The advantages brought by SOI are still questioned or not clearly understood and little information has been published about the comparison between bulk and SOI CMOS. First reason is that this comparison to be representative must be done for same process features such as gate length and gate oxide thickness, second reason is that designing the same circuit in both bulk and SOI requires a significant investment. 65nm CMOS bulk and SOI both developed at UMC 12" facility with same process features are compared in this paper.