학술논문
A comparison between voltage waveforms to enhance the lifetime of MEMS switch
Document Type
Conference
Author
Source
IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society. :2082-2087 Nov, 2011
Subject
Language
ISSN
1553-572X
Abstract
Dielectric charging and mechanical bouncing are two vital lifetime limiting factors of RF MEMS switches. Among the numerous approaches to improve the reliability of RF MEMS switch, tailoring the applied actuation voltage waveform is an approach that does not require physical changes to the MEMS switch design. This paper compares the performance of different actuation voltage waveforms in terms of their capability of reducing dielectric charging and contact bouncing, sensitivity to MEMS switch variations, the resulting switching speed and the complexity in their implementation.