학술논문

A 76 mm/sup 2/ 8 Mb chain ferroelectric memory
Document Type
Conference
Source
2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177) Solid-state circuits conference Solid-State Circuits Conference, 2001. Digest of Technical Papers. ISSCC. 2001 IEEE International. :40-41 2001
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Ferroelectric materials
Random access memory
Nonvolatile memory
Ferroelectric films
Capacitors
Voltage
CMOS technology
Electrodes
Capacitance
Consumer electronics
Language
ISSN
0193-6530
Abstract
An 8 Mb chain FeRAM uses 0.25 /spl mu/m 2-metal CMOS technology. A one-pitch-shift cell realizes 5.2 /spl mu/m/sup 2/ cell area. A chain architecture with a hierarchical wordline scheme gives 76 mm/sup 2/ die. Random access time is 40 ns, and cycle time is 70 ns at 3.0 V.