학술논문

An mK/spl times/nK modular image sensor design
Document Type
Conference
Source
Proceedings of International Electron Devices Meeting Electron devices Electron Devices Meeting, 1995. IEDM '95., International. :155-158 1995
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Image sensors
Clocks
Charge coupled devices
Lithography
Dark current
Production
Buildings
Resists
Costs
Filters
Language
ISSN
0163-1918
Abstract
A 1 K/spl times/2 K full frame sensor demonstrates a new modular sensor design. Each imager in the family is built from smaller, abutable blocks which are exposed in the correct position during lithography. These blocks can be stacked to form sensors of arbitrary size, all based on the same pixel structure. These pixels have a high charge handling capability, vertical anti-blooming, electronic shuttering, a high light sensitivity, and low dark current.