학술논문
Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits
Document Type
Conference
Author
Source
2024 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2024. :1-3 Mar, 2024
Subject
Language
Abstract
We demonstrate ultra-low propagation loss, lithographic precision, and wafer-scale manufacturing for high-density Si 3 N 4 photonic integrated circuits using an efficient DUV-based subtractive approach. We show a propagation loss as low as 1.4 dB/m at 1.55 µm.