학술논문

Single-layer microfluidic current source via optofluidic lithography
Document Type
Conference
Source
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :551-554 Jan, 2015
Subject
Aerospace
Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Power, Energy and Industry Applications
Transportation
Microfluidics
Pistons
Springs
Lithography
Resistance
Conductivity
Valves
Language
ISSN
1084-6999
Abstract
This work marks the first use of in-situ photopolymerization to create single-layer microfluidic devices which serve as ultra-low Reynolds Number (Re) current sources to regulate fluid flow rate independent of operating pressures. Autonomous fluidic components are an emerging aspect of micro/nanofluidic circuits and applications; however, many existing fluidic applications require specific pressure and/or flow rate conditions to perform optimally, and many require complex and expensive fabrication procedures. Here we introduce single-layer microfluidic system which utilize a spring and piston system - fabricated in situ via optofluidic lithography - to passively constrain fluid flow rate to a value independent of operating pressure. Experimental results revealed controlled flow rates of 29.2 ± 0.8 µl/min (from P = 50–100 mbar) and a maximum small-signal resistivity of 141.1 mbar-min/µl, which represents the highest performance for a low-pressure microfluidic current source.