학술논문
Stitch-Free Fabrication of Microoptical Elements Employing Femtosecond Laser 3D Lithography
Document Type
Conference
Author
Source
2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), 2019 Conference on. :1-1 Jun, 2019
Subject
Language
Abstract
Microoptics is a fast expanding field showing huge potential in providing science and industry with small yet highly functional tools for light control at a micro-scale. One of the most promising technologies to produce such elements is 3D laser lithography (3DLL) as it enables fabrication of free-form 3D objects with resolution and surface roughness control down to nm level [1]. So far it was employed to create integrated functioning monolithic 3D microoptical elements on functional substrates for in such applications as spatial light control [2] or imaging [3].