학술논문

F/sub 2/-laser micromachining of microfluidic channels and vias for biophotonic chip applications
Document Type
Conference
Source
Conference on Lasers and Electro-Optics, 2003. CLEO '03. Lasers and electro-optics Lasers and Electro-Optics, 2003. CLEO '03. Conference on. :3 pp. 2003
Subject
Photonics and Electrooptics
Components, Circuits, Devices and Systems
Micromachining
Microfluidics
Biophotonics
Glass
Biomedical optical imaging
Optical materials
Optical mixing
Biological materials
Optical surface waves
Laser modes
Language
Abstract
Deep-ultraviolet F/sub 2/-laser radiation drives strong interactions in optically transparent glasses for smooth and crack-free shaping of microfluidic channels, microvias, and arrays for cell-on-a-chip applications. We describe cell manipulation and imaging applications in custom fabricated biophotonic chips.