학술논문

Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography
Document Type
Conference
Source
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :498-501 Jan, 2014
Subject
Fields, Waves and Electromagnetics
Carbon
Microelectrodes
Arrays
Neurons
Fabrication
Language
ISSN
1084-6999
Abstract
Microelectrode arrays (MEAs) are widely used for stimulating and receiving electrical signals between human and machines and for in vitro neural study. This work demonstrates the fabrication process of nanofibrous 3D microelectrodes using immersion lithography. Oil immersion negates the diffraction effects intrinsic in the photopatterning of electrospun nanofibers to give increased aspect ratio microarchitectures. Nanofiber electrode resistivity is characterized and its performance compared to that of carbon thin film. In vitro testing of electrodes are performed using E18 cortical neurons and analyzed for cell density and cell viability.