부산대학교 도서관

In this work, we present the design and experimental demonstration of the first micro-resonator-based tunable hysteresis comparator. The proposed design employs an electrostatically driven clamped-clamped microbeam operated in the nonlinear regime. The design operation is assigned such that both the resonator’s drive frequency and beam bias can be utilized to tune the nonlinear dynamic behavior of the resonator. This tunable nonlinear behavior allows the device to exhibit a hysteretic voltage response with a tunable hysteresis voltage range. In the frequency tuning scheme, the hysteresis range is directly proportional to the driving frequency shift, with a maximum hysteresis portion of 51.4% achievable. In the voltage tuning scheme, the hysteresis range exhibits a linear relationship with the bias voltage variance without compromising tunability. Moreover, the voltage tuning scheme provides a simpler solution as it simplifies the complexity of the control system and provides a better stable and repeatable control capability. The proposed resonator-based comparator has many additional benefits, including stable electrical properties, a long lifetime due to the elimination of physical contact, and a wide tuning hysteresis range. Furthermore, the device has the potential for large voltage swing (~20V) interfacing in the microresonator-based electronics field. This high-voltage handling capability of our proposed resonator-based hysteresis comparator broadens its applicability, rendering it compatible with high-voltage systems. [2023-0084]