학술논문

Flexible Thin-Film BiTe Thermopile for Room Temperature Power Generation
Document Type
Conference
Source
19th IEEE International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. :946-949 2006
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Transistors
Temperature
Power generation
Character generation
Thermoelectricity
Sputtering
Crystallization
Voltage
TV
Conductivity
Language
ISSN
1084-6999
Abstract
This paper reports the characteristics of BiTe thin-films, the output result of the thermopile generator and the proposition of new design flexible thermopile generator. Power generation by thermoelectric conversion has advantages of maintenance-free, waste-free and quietness. Since a thermopile has a simple structure, miniaturization is comparatively easy. We obtained an output voltage of 160 tV/K per thermocouple, which is 4100 of the theoretical ' . . . ~~~~~~ optimize value. Furthermore, the resistivity of p-type BiTe thin-film had 110 mQ cm, which was 130 times greater than that of the bulk sputtering target. The main cause of crystalline difference was investigated by x-ray diffraction. The crystalline would be recovered by heat treatment. Due to the wavy structure and brittle thermoelectric materials, thermopile generator doesn't have enough flexibility. As a solution, new design and packaging has been proposed.