학술논문

A new X-ray microcalorimeter based on a pixelated TES array
Document Type
Periodical
Source
IEEE Transactions on Applied Superconductivity IEEE Trans. Appl. Supercond. Applied Superconductivity, IEEE Transactions on. 13(2):653-656 Jun, 2003
Subject
Fields, Waves and Electromagnetics
Engineered Materials, Dielectrics and Plasmas
X-ray imaging
Superconducting films
Image sensors
Energy resolution
Optical imaging
Superconductivity
Voltage
Temperature sensors
Shape
Prototypes
Language
ISSN
1051-8223
1558-2515
2378-7074
Abstract
We are developing a new x-ray microcalorimeter based on superconducting transition edge sensors (TES) as an imaging sensor. This device has ten pixelated transition edge sensors with Iridium superconductive films. When a constant bias voltage is applied to all pixels, each pixel is operated at slightly different equilibrium temperature. This arises from the different thermal responses between pixels, so that response signal shapes would vary according to the position of the incident x-ray. We have fabricated a prototype of the pixelated array and examined its performance. The position dependency measurements by scanning the collimated x-ray over the device have successfully shown that the device is able to resolve its pixel position. The energy resolution of a test device was 13.1 eV (FWHM) for 3 keV x-rays.