학술논문

Increasing the Speed of CCD-based Thermoreflectance Imaging: An Experimental and Theoretical Demonstration
Document Type
Conference
Source
2018 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2018 Conference on. :1-2 May, 2018
Subject
General Topics for Engineers
Photonics and Electrooptics
Thermoreflectance imaging
Prediction algorithms
Temperature measurement
Semiconductor device measurement
Modulation
Frequency measurement
Language
Abstract
To increase the speed of thermoreflectance imaging, we derive detailed statistical models of both the conventional imaging algorithm and our proposed higher speed technique, and we experimentally confirm both the models and resulting speed enhancement.