학술논문
Crystalline Complex Oxide Membrane: Sub-1 nm CET Dielectrics for 2D Transistors
Document Type
Conference
Author
Huang, Jing-Kai; Wan, Yi; Shi, Junjie; Zhang, Ji; Wang, Zeheng; Yang, Zi-Liang; Huang, Bo-Chao; Chiu, Ya-Ping; Wang, Wenxuan; Yang, Ni; Liu, Yang; Lin, Chun-Ho; Guan, Xinwei; Hu, Long; Yang, Jack; Wang, Danyang; Tung, Vincent; Kalantar-Zadeh, Kourosh; Wu, Tom; Zu, Xiaotao; Qiao, Liang; Li, Sean; Li, Lain-Jong
Source
2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :7.6.1-7.6.4 Dec, 2022
Subject
Language
ISSN
2156-017X
Abstract
Atomically thin 2D semiconductors have been regarded as promising candidates for the channels in ultra-scaled transistors. Although high-performance 2D field-effect transistors (FETs) have been demonstrated, the integration with conventional high-κ gate insulators is yet to be improved for energy-efficient devices. Here, 2D FETs with sub-1 nm capacitance equivalent thickness (CET) are demonstrated through the integration of transferrable single-crystal SrTiO 3 thin dielectrics with a monolayer CVD MoS 2 , where the optimized SrTiO 3 gate stack exhibits a gate leakage far below the low-standby-power limit (1.5×10 -2 A/cm 2 ). The short-channel devices manifest good reliability and competitive performance characteristics, including the steep subthreshold swing (SS) down to ~75 mV dec -1 and a large ON/OFF current ratio of 10 6 .