학술논문
Fabrication of a Stripe-Gate Type pH Sensor for Inhibition of Drift in pH Measurement for Long-Term Soil Monitoring
Document Type
Conference
Source
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :1357-1360 Jun, 2019
Subject
Language
ISSN
2167-0021
Abstract
An ISFET-type pH sensor with stripe gate electrodes to inhibit the drift was fabricated for long-term pH measurement. The line and space patterns of stripe gate electrodes were fabricated under the pH sensing membrane in a channel area of the FET. The voltage was applied to the gate electrodes to suppress the diffusions of the anions from the object solution in the sensing membrane. We confirmed the inhibition of the drift using the gate electrodes.