학술논문
SNS Josephson Junctions With Tunable Ta–N Barriers
Document Type
Periodical
Author
Source
IEEE Transactions on Applied Superconductivity IEEE Trans. Appl. Supercond. Applied Superconductivity, IEEE Transactions on. 29(5):1-4 Aug, 2019
Subject
Language
ISSN
1051-8223
1558-2515
2378-7074
1558-2515
2378-7074
Abstract
We report on the fabrication and characterization of Nb/Ta-N/Nb Josephson junctions grown by room temperature magnetron sputtering on 150-mm diameter Si wafers. Junction characteristics depend upon the Ta–N barrier composition, which was varied by adjusting the N 2 flow during film deposition. Higher N 2 flow rates raise the barrier resistance and increase the junction critical current. This work demonstrates the viability of Ta–N as an alternative barrier to aluminum oxide, with the potential for large scale integration.