부산대학교 도서관

Silicon-based photonics has generated a strong interest in recent years, mainly for optical telecommunications and optical interconnects in microelectronic circuits. The main rationales of silicon photonics are the reduction of photonic system costs and the increase of the number of functionalities on the same integrated chip by combining photonics and electronics. In this paper, we will present recent results on 40 Gbit/s optical modulators based on carrier depletion effect and germanium photodetectors integrated in silicon on insulator (SOI) waveguides. Both optoelectronic devices were fabricated on 300 mm platform. The achieved performances constitute a new milestone towards new generations of several Tbs/s chips merging electronics and photonics.