학술논문
Fully Solution-Processed Sodium Doped ZnO Thin-Film Transistors via a Low- Temperature Aqueous Route
Document Type
Conference
Author
Source
2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) Ultimate Integration on Silicon (EUROSOI-ULIS), 2019 Joint International EUROSOI Workshop and International Conference on. :1-4 Apr, 2019
Subject
Language
ISSN
2472-9132
Abstract
In this study, we develop a simple and eco-friendly aqueous route for the fabrication of sodium (Na) doped ZnO/AlO x thin-film transistors (TFTs). To prepare Na doped ZnO and AlO x thin films, ammonia water and deionized water were used as the precursor solvents. The A1O x thin film annealed at 300°C showed an areal-capacitance of 129 nf/cm 2 at 1 kHz. On the basis of its implementation as the gate oxide, fully solution-processed Na doped ZnO TFTs were fabricated and the electrical characteristics were systematically studied. The fully solution processed Na doped ZnO/ A1O x TFTs exhibited a high field effect mobility of 21 cm 2 V −1 s −1 , a subthreshold swing of 0.58 V/decade, a threshold voltage of 0.8 V, and an on/off current ratio of 2×104.