학술논문
Solution Processed ZnSnO Thin-film Transistors with Peroxide- Aluminum Oxide Dielectric
Document Type
Conference
Source
2019 International Conference on IC Design and Technology (ICICDT) IC Design and Technology (ICICDT), 2019 International Conference on. :1-4 Jun, 2019
Subject
Language
Abstract
In this work, we investigate an fabricating route of solution-processed thin-film transistors (TFTs). The high-k dielectric layers of aluminum oxide (AlO) were optimized through hydrogen peroxide (H 2 O 2 ). With Zn incorporation in tin oxide (SnO) semiconductor layer, the ZnSnO TFT with a field effect mobility of 4.3 cm 2 ·V −1 ·s −1 , a threshold voltage of 2 V, a subthreshold swing of 0.16 V/dec and an on/off ratio of 10 6 .