학술논문

Film Bulk Acoustic Wave Resonator for Trace Chemical Warfare Agents Simulants Detection in Micro Chromatography
Document Type
Conference
Source
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :45-48 Jun, 2019
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Film bulk acoustic resonators
Detectors
Coatings
Gas chromatography
Chemicals
Silicon
Surface treatment
Film bulk acoustic resonator
Chemical warfare agents
Micro Gas chromatography
Microfluidic channel
Language
ISSN
2167-0021
Abstract
This paper reported the polymer coated film bulk acoustic resonators (FBAR) as a sensitive detector in micro chromatography for the detection of trace chemical warfare agents (CWA) simulants. The FBAR sensor was enclosed in a microfluidic channel and then coupled with microfabricated separation column. The subsequent chromatographic analysis successfully demonstrated the detection of parts per billion (ppb) concentrations of chemical warfare agents (CWAs) simulants in a five components gas mixture. This work represented an important step toward the realization of FBAR based handheld micro chromatography for CWA detection in the field.