학술논문
Body Force Based Droplet Ejection by GHz Acoustic Micro-Transducer
Document Type
Conference
Author
Source
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :945-948 Jan, 2023
Subject
Language
ISSN
2160-1968
Abstract
This paper proposes a novel nozzle-free acoustic droplet ejection system based on GHz acoustic MEMS transducer. A strong body force could be generated to eject droplets when the GHz pulse signal is applied to the transducer. Compared with other acoustic ejection methods, the body force-based method generates focused radiation pressure without additional acoustic focus structures. Given its small size, nozzle-free, high acoustic radiation pressure and compatibility with complementary metal oxide semiconductor (CMOS) fabrication, the acoustic droplet ejection system has great potential in ink-jet printing, bioprinting and drug delivery applications.