학술논문

Optimization of extension doping technology for roll-off suppression of industrial 0.1-um pMOSFETs
Document Type
Conference
Source
30th European Solid-State Device Research Conference Solid-State Device Research Conference, 2000. Proceeding of the 30th European. :400-403 2000
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Doping
MOSFETs
CMOS technology
Boron
Ion beams
Communication industry
Fabrication
Ion implantation
Atomic measurements
Sea measurements
Language