학술논문

Investigation of the suitability of spike anneal for advanced CMOS technology

Document Type

Conference

Author

Lenoble, D.; Josse, E.; Grouillet, A.; Arnaud, F.; Julien, C.; Skotnicki, T.; Haond, M.

Source

30th European Solid-State Device Research Conference Solid-State Device Research Conference, 2000. Proceeding of the 30th European. :392-395 2000

Subject

Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
CMOS technology
Annealing
MOSFET circuits
CMOS process
MOS devices
Electrical resistance measurement
Electric resistance
Telecommunications
Microelectronics
Degradation

Language

Online Access

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