학술논문
Characterization of the SDS(R) gas source adsorbent technology
Document Type
Conference
Author
Source
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) Ion implantation technology Ion Implantation Technology, 2000. Conference on. :741-744 2000
Subject
Language
Abstract
The SDS(R) gas source is an adsorption based technology. The properties of the adsorbent dictate the SDS(R) performance related to gas storage, delivery capacity, and gas purity. Therefore ensuring a consistent adsorbent is one of the most critical tasks in SDS(R) manufacturing. In this paper, the key characteristics of SDS(R) adsorbent and their impact on SDS(R) performance will be discussed. These characteristics include: (1) adsorbent physical properties; (2) adsorbent pore size distribution and surface area; (3) adsorption and desorption isotherms; (4) refill (i.e. adsorption/desorption) cycles; (5) adsorbent shelf life; (6) gas desorption rate; and (7) SDS(R) gas purity. In addition, the practical aspects of cylinder refill procedures and cylinder utilization efficiency will be discussed.