학술논문
Self-aligned Fiber Attach on Monolithic Silicon Photonic Chips: Moisture Effect and Hermetic Seal
Document Type
Conference
Author
Source
2023 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2023. :1-3 Mar, 2023
Subject
Language
Abstract
We report a study on moisture effect on optical performance of monolithic silicon photonics technologies featuring V-grooves for self-aligned fiber attach. Chip-level hermetic sealing was achieved by implementing moisture barrier for the fiber coupler.