학술논문
Metasurfaces For Enhanced Energy Harvesting In MEMS With Lead-Free Piezoelectric Material
Document Type
Conference
Author
Source
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2024 25th International Conference on. :1-5 Apr, 2024
Subject
Language
ISSN
2833-8596
Abstract
Inspired by recent graded metamaterials designs, we create an innovative MEMS that combines a graded metamaterial with lead-free piezoelectric material for enhanced energy harvesting. The metamaterial is made of a graded array of resonators to achieve the so-called rainbow effect for the propagation of elastic waves along a suspended waveguide. Numerical models and experiments demonstrate that the rainbow effect increases the wavefield amplitude, inducing a boosted interaction with the resonators. The latter are equipped with lead-free piezoelectric material, namely Aluminium Nitride (AlN), and the device can transduce elastic energy into electric energy with a significant enhancement with respect to a single resonator without the metamaterial.