학술논문

Metasurfaces For Enhanced Energy Harvesting In MEMS With Lead-Free Piezoelectric Material
Document Type
Conference
Source
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2024 25th International Conference on. :1-5 Apr, 2024
Subject
Components, Circuits, Devices and Systems
Computing and Processing
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Waveguide components
Piezoelectric materials
Lead
Metamaterials
Energy harvesting
Resonators
Language
ISSN
2833-8596
Abstract
Inspired by recent graded metamaterials designs, we create an innovative MEMS that combines a graded metamaterial with lead-free piezoelectric material for enhanced energy harvesting. The metamaterial is made of a graded array of resonators to achieve the so-called rainbow effect for the propagation of elastic waves along a suspended waveguide. Numerical models and experiments demonstrate that the rainbow effect increases the wavefield amplitude, inducing a boosted interaction with the resonators. The latter are equipped with lead-free piezoelectric material, namely Aluminium Nitride (AlN), and the device can transduce elastic energy into electric energy with a significant enhancement with respect to a single resonator without the metamaterial.