학술논문
Low-Loss Silicon Technology for High-Q Bright Quantum Sources
Document Type
Conference
Author
Source
2019 IEEE 16th International Conference on Group IV Photonics (GFP) Group IV Photonics (GFP), 2019 IEEE 16th International Conference on. :1-2 Aug, 2019
Subject
Language
ISSN
1949-209X
Abstract
Atomic-scale sidewalls roughness smoothening thanks to high temperature hydrogen annealing is a key enabler for a low-loss (4 × 105) silicon micro-resonators for on-chip heralded single-photon bright quantum sources by spontaneous four-wave mixing.