학술논문

A One-Step Soft Lithography Technique for Making Microfluidic Pdms Chips with Macro-Scale Structures
Document Type
Conference
Source
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1170-1173 Jan, 2024
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Soft lithography
Punching
Reservoirs
Throughput
Microstructure
Microfluidics
PDMS chip
one-step molding technique
soft lithography
reservoirs
Language
ISSN
2160-1968
Abstract
A one-step molding technique was developed to fabricate a PDMS chip containing both microstructures and macrostructures such as inlets, outlets and reservoirs. The most critical step for molding was to establish the connection between macroscale and microscale features, which was achieved by blocking the through hole of a rigid mold with an elastic cone. The elastic cones and macrostructures were fabricated on the elastic mold, while micro structures were fabricated on the rigid mold. As a result, a digital PCR chip with four sample throughputs has been successfully fabricated. This technique is expected to be used to fabricate a wide variety of microfluidic chips.