학술논문
Transverse modes suppression and loss reduction for buried electrodes SAW devices
Document Type
Conference
Author
Source
2010 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2010 IEEE. :624-628 Oct, 2010
Subject
Language
ISSN
1051-0117
1948-5727
1948-5719
1948-5727
1948-5719
Abstract
High coupling substrates using overcoat layers of silicon oxide for temperature compensation exhibit a strong affinity toward multi-mode behavior. Apodization, which is the standard technique to suppress the transverse modes, suffers from drawbacks such as reduction of the transduction efficiency and additional losses. By changing the transducer layout, the guiding can be improved and a “piston mode” can be obtained. This approach is demonstrated on resonators and DMS test devices manufactured on lithium niobate with an orientation close to YX128 deg.