학술논문
Low Resistance Integrated Toroidal Inductors for Power Management
Document Type
Conference
Author
Source
INTERMAG 2006 - IEEE International Magnetics Conference Magnetics Conference, 2006. INTERMAG 2006. IEEE International. :60-60 May, 2006
Subject
Language
ISSN
2150-4598
2150-4601
2150-4601
Abstract
5.6×5.6×0.5mm 3 integrated toroidal inductors with high L/R DC ratio have been fabricated on Si substrates with microelectronics tools. The realization features thick layer Cu and Ni 80 Fe 20 technologies. Impedance measurements have been performed up to 100MHz. As a typical result, we show an inductor with L~500nH up to 10MHz, R DC ~110mΩ. To our knowledge, it is the best compromise shown so far. This demonstrates the interest of such integrated inductors to replace discrete ferrite inductors for compact power modules for mobile communication circuits.