부산대학교 도서관

Neutron irradiated high resistivity silicon detectors have been subjected to isochronous annealing in order to study the changes in the full depletion voltage and the leakage current. The corresponding evolution of bulk damage induced defect levels was monitored using the TSC method. A single TSC peak is found to be correlated with the transient decay of the depletion voltage which is observed after elevated temperature annealing of inverted detectors. In conjunction with deep level parameters obtained from an I-DLTS study and changes observed in the effective doping concentration and in the leakage current after exposure to high doses of /sup 60/Co-gammas, new insight is gained into the radiation induced device deterioration and the corresponding annealing behavior.