학술논문
Aerosol-Assisted plasma deposition of nanocomposite thin films
Document Type
Conference
Author
Source
2022 IEEE 22nd International Conference on Nanotechnology (NANO) Nanotechnology (NANO), 2022 IEEE 22nd International Conference on. :413-416 Jul, 2022
Subject
Language
ISSN
1944-9380
Abstract
Aerosol injection is an appealing method for plasma thin film deposition. It enables to use liquids as well as dispersions independently on their characteristics. Here, nanocomposite thin films are formed by pulsed injection of a colloidal solution in low-pressure plasma. We discuss the effects of pulsed aerosol injection parameters on the balance of matter.